Calculating Accuracy - An Example

Example of a typical single axis accuracy specification:

E₁ = the linear measurement error in a particular axis
1.5 = the constant; in this case there is a 1.5 micron uncertainty in this axis that is independent of the length of travel in the axis
6 = the stated multiplier; the travel-dependent component of the Z-axis measurement error
L = the length of travel for the measurement, in millimeters

For a stage movement of 150 mm:

Substituting into the equation:

E₁ = (1.5 + 6L/1000) µm

E₁ = (1.5 + (6 * 150)/1000) µm

E₁ = (1.5 + (900)/1000) µm

E₁ = (1.5 + 0.9) µm

E₁ = 2.4 µm

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