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XYZ Travel (mm)
Standard:: 250 x 150 x 200
SmartScope® M7 is the next evolution of the worldwide standard in 3D multisensor metrology.
The patented IntelliCentric™-M Optical System features fully telecentric fixed lens optics and VIRTUAL ZOOM™ technology, paired with a high-density 20 MP digital metrology camera and a built-in electronic aperture, delivering an ultra-high-resolution image with low distortion – perfect for high-speed edge detection metrology.
Ultra-High-Resolution Images – All LED coaxial, substage profile, and SmartRing™ light illumination comes standard
Sturdy, Stable Construction – Heavy-duty cast base and integral compound stage with Y-axis center drive for stability. DC Servo motors offer fast, accurate positioning
Multisensor Versatility – Optional TP-20 and TP-200 touch probes, SP-25 Scanning Probe, Feather Probe™, Through-the-Lens (TTL) Laser, Rainbow Probe™, TeleStar® Probe
Technical Data
XYZ Travel (mm)
Standard:
250 x 150 x 200
Optional
Extended X-axis, 300 mm
Optics
Standard
Fixed optical magnification with digital zoom, M 11.5 standard lens
Optional
M 20.10 Wide Field-of-View / Long Working Distance
M 6.3 High Magnification
M 2.1 Ultra-High-Magnification
Focus Grid Projector
Illumination
Standard
Substage LED profile, coaxial LED surface, SmartRing™ LED ring light (green)
Optional
White SmartRing
Sensors & Accessories
Tactile Sensors
Non-Contact Sensors
Accessories
| Standard | Optional | |
|---|---|---|
| XYZ Travel | 250 x 150 x 200 mm | Extended X-axis: 300 mm |
| XYZ Scale Resolution | 0.1 μm | 0.05 µm (includes dual X scales) |
| Drive System | DC servo with 3-axis control (X, Y, Z), manual XY fine adjusters, and multifunction handheld controller | |
| Worktable | Hardcoat anodized with fixture holes and removable stage glass; 25 kg recommended max payload | |
| Rotary Axis | Miniature Servo Rotary (MSR™), MicroTheta Rotary (MTR™) | |
| Optics1 | Fixed optical magnification with VIRTUAL ZOOM, M 11.5 standard lens | Focus Grid Projector: LED source Laser Adapter: Allows for field retrofit of TTL Laser (includes laser pointer) Replacement Lens: M 20.10 Wide Field-of-View/Long Working Distance Replacement / Laser Lens: M 6.3 High Magnification (included with TTL laser), M 2.1 Ultra-High Magnification |
| Illumination | Substage LED profile, coaxial LED surface, SmartRing™ LED ring light (green) | White SmartRing™, Conical SmartRing (included with M 2.1 lens) |
| Metrology Camera | 20 megapixel monochrome digital metrology camera | |
| Field of View | 8 x 8 mm | M 20.10: 14 x 14 mm M 6.3: 4 x 4 mm M 2.1: 1.4 x 1.4 mm |
| Minimum Feature Size2 | 5 µm | M 20.10: 10 µm M 6.3: 3 µm M 2.1: 1 µm |
| Working Distance | 68 mm | M 20.10: 98 mm M 6.3: 36 mm M 2.1: 16 mm |
| Sensor Options3 | Tactile: TP20 or TP200 Touch Probe, SP25 Scanning Probe, Feather Probe™ Non-Contact: Through-The-Lens (TTL) Laser, TeleStar® Probe, Rainbow Probe™, DRS™ Laser |
|
| Software | ZONE3 Express metrology software, QVI® Portal | Metrology Software: ZONE3 Prime or Pro Productivity Software: EVOLVE® Suite (Design, Manufacturing, SmartProfile®, SPC) Offline Software: ZONE3 |
| System Controller | Windows® based with up-to-date processor and on- board networking/communication ports |
High-Performance Controller |
| Controller Options | 24” flat panel LCD monitor or dual 24” flat panel LCD monitors, keyboard, 3-button mouse (or user supplied) | |
| Accessories | Digital I/O Automation Interface | |
| Power Requirements | 100-120 VAC or 200-240 VAC, 50/60 Hz, 1 phase, 900 W | |
| Safe Operating Environment | 15-30 °C, non-condensing | |
| Rated Environment | Temperature 18-22 °C, stable to ± 1 °C, max rate of change 0.5 °C / hour, max vertical gradient of 1 °C / meter; 30-80% humidity; vibration <0.001 g below 15 Hz | |
| XY Area Accuracy | E2 = (1.8 + 5L/1000) μm | |
| Z Linear Accuracy | E1 = (2.5 + 5L/1000) μm | E1 = (2.0 + 5L/1000) µm (requires touch probe or TTL laser) E1 = (1.5 + 5L/1000) µm (requires TeleStar Probe) |
- Accuracy is evaluated with a QVI compensation and verification procedure where “L” is measured length in millimeters. Specifications apply within the rated environment. Standard optical specifications apply at the highest magnification of the
standard configuration. XY Accuracy applies with an evenly distributed load up to 5 kg in the standard measuring plane. The standard measuring plane is defined as a plane that is within 25 mm of the worktable surface. Depending on load
distribution, accuracy at maximum payload may be less than standard. Factory and on-site verification of enhanced Z accuracy specifications are quoted on request.
1. US Patent No. 12 052 501. Lenses can be manually interchanged to change magnification and working distance.
2. Based on width measurement of USAF resolution test chart in best focus at the highest magnification with profile illumination. For reference only.
3. Touch Probe can be fixed mounted or on motorized deployment mechanism. TeleStar and Rainbow Probes can be fixed mounted or on mechanical deployment mechanism. TTL Laser and TeleStar Probe not available together.
Last updated: March 2026
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