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XYZ Travel
Standard: 300 x 300 x 250 mm
Scanning Probe Performance
SmartScope® SP systems are designed for optimum scanning probe performance. Starting with a rigid base structure, the system mechanics are designed to optimize dynamic data acquisition critical to scanning probe performance. Most performance specifications for SP models are according to ISO 10360 standards.
The SmartScope SP 332 offers:
- High performance in a convenient benchtop package
- Elevating-bridge design provides machined-in squareness and a large work
envelope that uses very little floor space - An air-bearing Z-axis motion system provides the friction free motion and stiffness
necessary for excellent scanning probe performance
Technical Data
XYZ Travel
Standard
300 x 300 x 250 mm
Optics
Standard
OGP® SP zoom optics with AccuCentric® autocompensation, one standard front lens and 5.5x optical zoom offer up to 60:1 digital/optical magnification range with maximum 90 mm WD.
Optional
2x, 5x lens
Illumination
Standard
All monochromatic LED: substage profile, coaxial surface, SmartRing™ ring light
Optional
LED focus grid illuminator
Sensors & Accessories
Tactile Sensors
Laser Sensors
Accessories
| SmartScope SP 332 | SmartScope SP 463 | SmartScope SP 663 | |
|---|---|---|---|
| XYZ travel | 300 mm x 300 mm x 250 mm | 450 mm x 610 mm x 300 mm | 650 mm x 660 mm x 300 mm |
| XYZ measuring range with standard lens | 300 mm x 300 mm x 200 mm | 450 mm x 610 mm x 250 mm | 650 mm x 660 mm x 250 mm |
| Machine dimensions | 850 mm x 870 mm x 1025 mm | 1085 mm x 1650 mm x 2060 mm | 1475 mm x 1830 mm x 2060 mm |
| Drive system | 4-axis DC servo drive (X, Y, Z, and zoom) with dual drive, air bearing Z axis | 4-axis DC servo drives (X, Y, Z, and zoom) | 4-axis DC servo drive (X, Y, Z, and zoom) |
| XYZ scale resolution | Standard: 0.1 µm; including dual Z-axis scales; Optional: 0.05 µm | Standard: 0.1 µm; Optional: 0.05 µm | Standard: 0.1 µm, including dual Y-axis scales; Optional 0.05 µm |
| System weight | 160 kg | 1160 kg | 1800 kg |
| Shipping weight | 230 kg | 1400 kg | 2300 kg |
| Worktable | Hardcoat worksurface with tapped fixture holes and removable glass insert | ||
| Worktable payload | 30 kg | 50 kg | 130 kg |
| Rotary axis | Optional Miniature Servo rotary, or MicroTheta™ rotary | Optional Miniature Servo rotary, MicroTheta rotary, or Heavy Duty rotary and Dual Rotary indexers. Consult the factory for complete information about available rotary indexer combinations. | |
| Power requirements | 100-120 VAC or 200-240 VAC, 50/60 Hz, 1 phase, 900 W | 100-120 VAC or 200-240 VAC, 50/60 Hz, 1 phase, 1500 W | 100-120 VAC or 200-240 VAC, 50/60 Hz, 1 phase, 1100 W |
| Compressed air requirements (332 model only) |
Air supply pressure: 0.45 MPa; Minimum Flow capacity: 32 l/min; Air quality ISO 8573-1:2010 Class 4.3.4 or better Optional: Air dryer kit | ||
| Rated environment | Temperature: 18-22 °C, stable to ± 1 °C; Maximum rate of temperature change: 0.5 °C / hour, maximum vertical thermal gradient: 1 °C / meter. Humidity: 30-80%; Vibration <0.001g below 15 Hz | ||
| Safe operating environment | Temperature: 15-30 °C, non-condensing | ||
| Standard | Optional | |
|---|---|---|
| Optics | Zoom optics with AccuCentric® auto-compensation, 1x standard front lens and 5.5x optical zoom offer up to 60:1 digital/optical magnification range with maximum 90 mm working distance | Replacement/Laser Lenses: 2x (38 mm working distance), 5x (16 mm working distance) |
| Illumination | All monochromatic LED: substage profile, coaxial surface, SmartRing™ ring light | LED focus grid illuminator |
| Camera | 5 MP monochrome digital metrology camera | |
| Field of view size Low optical zoom High optical zoom Max digital zoom | 1x: 12.1 mm x 10.1 mm 2.2 mm x 1.8 mm 0.20 mm x 0.16 mm |
2x:5x:
4.7 mm x 3.9 mm0.9 mm x 0.7 mm
0.9 mm x 0.7 mm0.43 mm x 0.35 mm
0.08 mm x 0.06 mm0.04 mm x 0.03 mm |
| Scanning sensors | QVI® scanning controller, SP25M scanning probe; 3 position change rack; calibration kit including kinematic mount and certified 25 mm sphere; SP25 scanning probe kit including SM25-2 scanning module, SH25-2 stylus holder (x2), and M3 D3 x L21 ruby stylus | 6 position change rack; additional SM25-1, SM25-3, SM25-4, SM25-5, TM25 scanning and touch modules, stylus holders, and styli |
| Laser sensors | TeleStar® Plus TTL laser adapter (includes laser pointer), TeleStar Plus interferometric TTL laser | |
| Controller | Windows® based, with up-to-date processor, on board networking/communication ports and integral QVI scanning controller for laser and tactile scanning; multifunction handheld controller for operator control | |
| Controller options | 24” flat panel monitor, keyboard, 3-button mouse. Ergonomic sit-stand operator workstation for 463 and 663 models. | Dual 24” flat panel monitors; granite / laminate operator workstation for benchtop 332 model. |
| Software | - ZONE3® Express 3D Metrology Software - QVI Portal | Metrology Software: ZONE3 Prime, ZONE3 Pro Productivity Software: EVOLVE® Suite (Design, Manufacturing, SmartProfile®, SPC) Offline Software: ZONE3 |
Performance and Accuracy Specifications1
| SmartScope SP Model | 332 | 463 | 663 | |
|---|---|---|---|---|
| Optical (per ISO 10360-7:2011)5 | ||||
| X or Y length measurement errors2,3,4 | MPE(EUX[Y]) | (1.5 + 5L/1000) µm | (1.5 + 5L/1000) µm | (2.0 + 5L/1000) µm |
| XY length measurement errors2,3,4 | MPE(EUXY) | (1.9 + 5L/1000) µm | (1.9 + 5L/1000) µm | (2.4 + 5L/1000) µm |
| Length measurement errors2,3,9 | MPE(EU) | (3.9 + 5L/1000) µm | (3.4 + 5L/1000) µm | (4.4 + 5L/1000) µm |
| Repeatability of XY length measurement errors3,4 | MPL(RUXY) | 1.5 µm | 1.5 µm | 2.0 µm |
| Probing error | MPE(PF2D) | 1.9 µm | 1.9 µm | 1.9 µm |
| Probing error of imaging probe | MPE(PFV2D) | 1.2 µm | 1.2 µm | 1.2 µm |
| Autofocus Performance (per QVI #790218)2,5 | ||||
| Z-linear autofocus accuracy | E1 | (3.8 + 5L/1000) µm | (3.8 + 5L/1000) µm | (3.8 + 5L/1000) µm |
| SP25 Tactile Probe Performance (per ISO 10360-5:2020)6,7 | ||||
| Single stylus form error | MPE(P[Form.Sph.1x25:SS:Tact]) | 3.8 µm | 2.5 µm | 3.0 µm |
| Scanning mode form error | MPE(P[Form.Sph.Scan:PP:Tact]) | 4.5 µm | 2.5 µm | 3.5 µm |
| Time for scanning mode form error | MPL(τ[Sph.Scan:PP:Tact]) | 70 sec | 70 sec | 75 sec |
| TeleStar® Plus Laser Performance (per ISO 10360-8:2013)8 | ||||
| Probing size error | MPE(P[Size.Sph.1x25:Tr:ODS]) | 3.5 µm | 3.5 µm | 3.5 µm |
- 1. Specifications apply to thermally stable system in the rated environment, operating in accordance with the procedures in the operating manual, with an evenly distributed load (up to 5 kg for 332 and 10 kg for 463/663). Depending on load distribution, accuracy at maximum payload may be less than standard.
- 2. Where L = measuring length in mm.
- 3. Artifact may be low expansion with a CTE no greater than 1 × 10-6 / °C and with a CTE expanded uncertainty (k = 2) no greater than 1 × 10-6 / °C, and will have calibrated values adjusted to the CTE of steel per ISO 10360-7:2011.
- 4. Measured in standard measuring plane that is within 25 mm of the worktable surface.
- 5. Specifications apply at the maximum optical magnification of the standard configuration.
- 6. Using SP25 with SM25-2 module with 3.0 mm x 21 mm A-5000-3553 stylus.
- 7. Target tip deflection of 0.2 mm, filter 50 UPR.
- 8. Where measurements are taken in a region of the sphere within a cone angle of 150°.
- 9. Factory verification to E0 specifications in lieu of EU is optionally available. On-site verification of EU or E0 is optional.
Last updated: July 2025
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