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Pinnacle

High Throughput, High Accuracy Metrology System

Pinnacle

OGP Pinnacle offers the highest accuracy and fastest speeds of the high performance fixed optics line.

Pinnacle features a damped granite base and column, with passive vibration isolation. A precision compound X-Y stage with high-speed linear motor drives provides velocity of 400 mm / sec and acceleration of 1000 mm / sec2. This combination of high acceleration and high velocity enables the high throughput required for near-line process monitoring. The rugged and compact design of Pinnacle lends itself to installation in either a Q/A lab or at an inspection station in the manufacturing line.